Invention Grant
- Patent Title: Vibration element, electronic apparatus, and vehicle
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Application No.: US16911437Application Date: 2020-06-25
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Publication No.: US11538981B2Publication Date: 2022-12-27
- Inventor: Kenichi Kurokawa , Yukio Kitahara , Kazuo Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-118290 20190626
- Main IPC: H01L41/083
- IPC: H01L41/083 ; H01L41/09 ; H01L41/18 ; H01L41/257 ; H03H9/13 ; H03H9/21 ; H03H9/125 ; H03H9/24

Abstract:
A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.
Public/Granted literature
- US2153397A Machinable sinter bearing Public/Granted day:1939-04-04
Information query
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