Invention Grant
- Patent Title: Evaporating mask plate, evaporating mask plate set, evaporating system, and alignment test method
-
Application No.: US16068995Application Date: 2018-01-05
-
Publication No.: US11538993B2Publication Date: 2022-12-27
- Inventor: Weiwei Ding , Jianpeng Wu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing; CN Sichuan
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing; CN Sichuan
- Agency: Brooks Kushman P.C.
- Priority: CN201710414315.4 20170605
- International Application: PCT/CN2018/071549 WO 20180105
- International Announcement: WO2018/223695 WO 20181213
- Main IPC: H01L51/00
- IPC: H01L51/00 ; C23C14/04 ; C23C14/12 ; C23C14/24 ; H01L51/56
Abstract:
An evaporating mask plate, an evaporating mask plate set and an evaporating system are provided. The evaporating mask plate includes a mask pattern plate. The evaporating mask pattern plate includes an evaporating area and a test area located around the evaporating area. The test area is provided with at least two test element groups located in different regions of the test area, and each test element group includes at least one test hole for alignment.
Public/Granted literature
- US20210280788A1 EVAPORATING MASK PLATE, EVAPORATING MASK PLATE SET, EVAPORATING SYSTEM, AND ALIGNMENT TEST METHOD Public/Granted day:2021-09-09
Information query
IPC分类:
