Invention Grant
- Patent Title: Acoustic wave device, high-frequency front-end circuit, and communication device
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Application No.: US16906096Application Date: 2020-06-19
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Publication No.: US11539343B2Publication Date: 2022-12-27
- Inventor: Yuzo Kishi , Yutaka Kishimoto , Makoto Sawamura , Seiji Kai
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2017-245673 20171222
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03F3/21 ; H03H9/05 ; H03H9/10 ; H03H9/145 ; H03H9/25 ; H04B1/40

Abstract:
An acoustic wave device includes a silicon support substrate that includes first and second main surfaces opposing each other, a piezoelectric structure provided on the first main surface and including the piezoelectric layer, an IDT electrode provided on the piezoelectric layer, a support layer provided on the first main surface of the silicon support substrate and surrounding the piezoelectric layer, a cover layer provided on the support layer, a through-via electrode that extending through the silicon support substrate and the piezoelectric structure, and a first wiring electrode connected to the through-via electrode and electrically connected to the IDT electrode. The piezoelectric structure includes at least one layer having an insulating property, the at least one layer including the piezoelectric layer. The first wiring electrode is provided on the layer having an insulating property in the piezoelectric structure.
Public/Granted literature
- US20200321937A1 ACOUSTIC WAVE DEVICE, HIGH-FREQUENCY FRONT-END CIRCUIT, AND COMMUNICATION DEVICE Public/Granted day:2020-10-08
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