Invention Grant
- Patent Title: Polishing pad, manufacturing method of polishing pad and polishing method
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Application No.: US16387494Application Date: 2019-04-17
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Publication No.: US11541505B2Publication Date: 2023-01-03
- Inventor: Yu-Piao Wang , I-Ping Chen
- Applicant: IV Technologies CO., Ltd.
- Applicant Address: TW Taichung
- Assignee: IV Technologies CO., Ltd.
- Current Assignee: IV Technologies CO., Ltd.
- Current Assignee Address: TW Taichung
- Agency: JCIPRNET
- Priority: TW107113416 20180419
- Main IPC: B24B37/22
- IPC: B24B37/22 ; B24D11/00 ; B24B37/24

Abstract:
A polishing pad is provided. The polishing pad comprises a polishing layer and a metal-containing layer. The polishing layer has a polishing surface and a backside surface opposite to each other, wherein the backside surface has a plurality of cavities. The metal-containing layer is disposed on the backside surface of the polishing layer and fills into the cavities, wherein a first contact area is between the metal-containing layer and the backside surface of the polishing layer, and the first contact area is larger than the orthogonal projection area of the polishing layer.
Public/Granted literature
- US20190321936A1 POLISHING PAD, MANUFACTURING METHOD OF POLISHING PAD AND POLISHING METHOD Public/Granted day:2019-10-24
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