Resistivity adjustment device and resistivity adjustment method
Abstract:
A specific resistance value adjustment apparatus includes: a hollow fiber membrane module; a module passing pipe which passes through the hollow fiber membrane module; a bypassing pipe which bypasses the hollow fiber membrane module; a liquid discharge pipe which communicates with the module passing pipe and the bypassing pipe through a joint portion; a first flow rate detection unit which detects a first flow rate of a liquid flowing to at least one of a liquid supply pipe and the liquid discharge pipe; a control valve which opens and closes the module passing pipe; and a control unit which sets an opening degree of the control valve in response to the first flow rate detected by the first flow rate detection unit.
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