Invention Grant
- Patent Title: TiCN having reduced growth defects by means of HiPIMS
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Application No.: US16095369Application Date: 2017-04-21
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Publication No.: US11542587B2Publication Date: 2023-01-03
- Inventor: Denis Kurapov , Siegfried Krassnitzer
- Applicant: Oerlikon Surface Solutions AG, Pfäffikon
- Applicant Address: CH Pfäffikon
- Assignee: Oerlikon Surface Solutions AG, Pfäffikon
- Current Assignee: Oerlikon Surface Solutions AG, Pfäffikon
- Current Assignee Address: CH Pfäffikon
- Agency: Polson Intellectual Property Law, PC
- Agent Margaret Polson; Christopher Sylvain
- International Application: PCT/EP2017/000500 WO 20170421
- International Announcement: WO2017/182124 WO 20171026
- Main IPC: C23C14/00
- IPC: C23C14/00 ; H01J37/34 ; C23C14/02 ; C23C14/35 ; C23C14/06 ; C23C14/34

Abstract:
A method for applying a coating having at least one TiCN layer to a surface of a substrate to be coated by means of high power impulse magnetron sputtering (HIPIMS), wherein, to deposit the at least one TiCN layer, at least one Ti target is used as the Ti source for producing the TiCN layer, said target being sputtered in a reactive atmosphere by means of a HIPIMS process in a coating chamber, wherein the reactive atmosphere comprises at least one inert gas; preferably argon, and at least nitrogen gas as the reactive gas, wherein: the reactive atmosphere additionally contains, as a second reactive gas, a gas containing carbon, preferably CH4, used as the source of carbon to produce the TiCN layer wherein, while depositing the TiCN layer, a bipolar bias voltage is applied to the substrate to be coated, or at least one graphite target is used as the source of carbon for producing the TiCN layer, said target being used for sputtering in the coating chamber using a HIPIMS process with the reactive atmosphere having only nitrogen gas as the reactive gas, wherein the Ti targets are preferably operated by means of a first power supply device or a first power supply unit and the graphite targets are operated with pulsed power by means of a second power supply device or a second power supply unit.
Public/Granted literature
- US20190136363A1 TICN Having Reduced Growth Defects by Means of HIPIMS Public/Granted day:2019-05-09
Information query
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