Invention Grant
- Patent Title: Optical monitor
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Application No.: US16459433Application Date: 2019-07-01
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Publication No.: US11542596B2Publication Date: 2023-01-03
- Inventor: Markus K. Tilsch , Benjamin F. Catching
- Applicant: VIAVI Solutions Inc.
- Applicant Address: US CA San Jose
- Assignee: VIAVI Solutions Inc.
- Current Assignee: VIAVI Solutions Inc.
- Current Assignee Address: US CA San Jose
- Agency: Harrity & Harrity, LLP
- Main IPC: C23C14/54
- IPC: C23C14/54 ; G01B11/06 ; B05C11/10 ; G01N21/84 ; C23C14/50
Abstract:
A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.
Public/Granted literature
- US20210002756A1 OPTICAL MONITOR Public/Granted day:2021-01-07
Information query
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