Invention Grant
- Patent Title: Stage driving apparatus, lithography apparatus, and method of manufacturing article
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Application No.: US16363025Application Date: 2019-03-25
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Publication No.: US11543745B2Publication Date: 2023-01-03
- Inventor: Satoshi Iwatani
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2018-069173 20180330
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
The present invention provides a stage driving apparatus for driving a stage, the apparatus comprising: a linear motor including a stator having a plurality of coils arrayed along a driving direction of the stage, and a mover provided with the stage; and a controller configured to control the linear motor, wherein the mover includes a permanent magnet provided on one of an upper side and a lower side of the plurality of coils, and an electromagnet provided on the other, the stator includes a yoke member provided to cover the electromagnet side of the plurality of coils, and the controller controls driving of the stage in the driving direction while floating the mover relative to the stator by controlling energization to the plurality of coils and the electromagnet.
Public/Granted literature
- US20190302612A1 STAGE DRIVING APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2019-10-03
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