Invention Grant
- Patent Title: Air pressure control device
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Application No.: US17401463Application Date: 2021-08-13
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Publication No.: US11543838B2Publication Date: 2023-01-03
- Inventor: Chung Woo Lee , In Kyu Park , Yong Seok Jang , Sung Youn Jeon
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: KR10-2020-0102682 20200814
- Main IPC: G05D16/20
- IPC: G05D16/20 ; G05B19/042 ; H02P8/40 ; H02P21/18

Abstract:
Disclosed is an air pressure control (APC) device according to an embodiment of the inventive concept. The air pressure control (APC) device may include a processing chamber, a plate for adjusting a pressure in the processing chamber, and an APC valve including first and second step motors for adjusting a height of the plate, and an APC controller that controls the APC valve, and the APC controller may include a first controller that controls positions of the first step motor and the second step motor; and a second controller that compensates for a difference in position between the first step motor and the second step motor.
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