Invention Grant
- Patent Title: Magnetic integrated lift pin system for a chemical processing chamber
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Application No.: US16509010Application Date: 2019-07-11
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Publication No.: US11545387B2Publication Date: 2023-01-03
- Inventor: William Inhofer , Sean Moore , Todd Maciej
- Applicant: TEL FSI, Inc.
- Applicant Address: US MN Chaska
- Assignee: TEL FSI, Inc.
- Current Assignee: TEL FSI, Inc.
- Current Assignee Address: US MN Chaska
- Agency: Kagan Binder, PLLC
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01F7/16 ; B25B11/00 ; H01F7/18 ; H01L21/67 ; H01F7/08
Abstract:
The present invention provides lift pin strategies with a reduced risk of causing contamination due to the up and down actuation of lift pins. The present invention provides a lift pin system that uses electromagnetic actuation strategies in order to raise and lower lift pins. The electromagnetic forces act remotely on the lift pins so that direct contact or coupling of the lift pins to actuation components is not required. This avoids contamination that otherwise would be associated with friction and associated lubricants used for mechanical actuation strategies.
Public/Granted literature
- US20200020566A1 Magnetic Integrated Lift Pin System for a Chemical Processing Chamber Public/Granted day:2020-01-16
Information query
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