Invention Grant
- Patent Title: Semiconductor device with barrier layer and method for fabricating the same
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Application No.: US17234282Application Date: 2021-04-19
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Publication No.: US11545453B2Publication Date: 2023-01-03
- Inventor: Ming-Hung Hsieh
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L23/00

Abstract:
The present application discloses a semiconductor device with a barrier layer including aluminum fluoride and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a circuit layer positioned on the substrate, a pad layer positioned in the circuit layer and including aluminum and copper, a first barrier layer positioned on the pad layer and including aluminum fluoride, and a first connector positioned on the first barrier layer.
Public/Granted literature
- US20220336389A1 SEMICONDUCTOR DEVICE WITH BARRIER LAYER AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-10-20
Information query
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