Invention Grant
- Patent Title: High-voltage devices integrated on semiconductor-on-insulator substrate
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Application No.: US16736818Application Date: 2020-01-08
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Publication No.: US11545570B2Publication Date: 2023-01-03
- Inventor: Pinghui Li , Handoko Linewih , Darin Arthur Chan , Ruchil Kumar Jain
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agent David Cain
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66

Abstract:
The present disclosure generally to semiconductor devices, and more particularly to semiconductor devices having high-voltage transistors integrated on a semiconductor-on-insulator substrate and methods of forming the same. The present disclosure provides a semiconductor device including a semiconductor-on-insulator (SOI) substrate having a semiconductor layer, a bulk substrate and an insulating layer between the semiconductor layer and the bulk substrate, a source region and a drain region disposed on the bulk substrate, an isolation structure extending through the insulating layer and the semiconductor layer and terminates in the bulk substrate, and a gate structure between the source region and the drain region, the gate structure is disposed on the semiconductor layer.
Public/Granted literature
- US20210210630A1 HIGH-VOLTAGE DEVICES INTEGRATED ON SEMICONDUCTOR-ON-INSULATOR SUBSTRATE Public/Granted day:2021-07-08
Information query
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