Invention Grant
- Patent Title: Capacitive micro structure
-
Application No.: US16624181Application Date: 2018-06-15
-
Publication No.: US11548779B2Publication Date: 2023-01-10
- Inventor: Hannu Kattelus , Tauno Vähä-Heikkilä
- Applicant: Teknologian Tutkimuskeskus VTT Oy
- Applicant Address: FI Espoo
- Assignee: Teknologian Tutkimuskeskus VTT Oy
- Current Assignee: Teknologian Tutkimuskeskus VTT Oy
- Current Assignee Address: FI Espoo
- Agency: Ziegler IP Law Group, LLC
- Priority: FI20175571 20170619
- International Application: PCT/FI2018/050467 WO 20180615
- International Announcement: WO2018/234629 WO 20181227
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; H01L49/02

Abstract:
A micro structure with a substrate having a top surface; a first electrode with a horizontal orientation parallel to the top surface of the substrate, wherein the first electrode is embedded within the substrate so that a top surface of the first electrode coincides with the top surface of the substrate; a dielectric layer arranged on the top surface of the first electrode; and a second electrode arranged above the dielectric layer.
Public/Granted literature
- US20200180943A1 CAPACITIVE MICRO STRUCTURE Public/Granted day:2020-06-11
Information query