Invention Grant
- Patent Title: Method and apparatus for processing oxygen-containing workpiece
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Application No.: US16529148Application Date: 2019-08-01
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Publication No.: US11548804B2Publication Date: 2023-01-10
- Inventor: Reiko Sasahara , Yasuo Nakatani , Keiko Hada
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2018149721 20180808
- Main IPC: C03B19/14
- IPC: C03B19/14 ; H01L21/3115 ; H01L21/02
Abstract:
There is provided a method of processing an oxygen-containing workpiece. The method of processing an oxygen-containing workpiece includes controlling a fluorine concentration in the oxygen-containing workpiece based on at least one of a kind of a fluorine-containing processing gas, a processing temperature and a processing pressure used for processing the oxygen-containing workpiece.
Public/Granted literature
- US20200048134A1 METHOD AND APPARATUS FOR PROCESSING OXYGEN-CONTAINING WORKPIECE Public/Granted day:2020-02-13
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