Invention Grant
- Patent Title: Composition for a polishing pad, polishing pad, and process for preparing the same
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Application No.: US16721284Application Date: 2019-12-19
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Publication No.: US11548970B2Publication Date: 2023-01-10
- Inventor: Eun Sun Joeng , Hye Young Heo , Jang Won Seo , Jong Wook Yun
- Applicant: SKC solmics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: SKC solmics Co., Ltd.
- Current Assignee: SKC solmics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2018-0169447 20181226,KR10-2018-0169477 20181226,KR10-2018-0169511 20181226
- Main IPC: C08G18/10
- IPC: C08G18/10 ; C08G18/76 ; B29C45/00 ; B24B37/26 ; B24B37/24 ; H01L21/321 ; B29K75/00 ; C08K5/00

Abstract:
In the composition according to the embodiment, the content of an unreacted diisocyanate monomer in a urethane-based prepolymer may be controlled to control the physical properties thereof such as gelation time. Thus, since the micropore characteristics, polishing rate, and pad cut rate of a polishing pad obtained by curing the composition according to the embodiment may be controlled, it is possible to efficiently manufacture high-quality semiconductor devices using the polishing pad.
Public/Granted literature
- US20200207904A1 COMPOSITION FOR A POLISHING PAD, POLISHING PAD, AND PROCESS FOR PREPARING THE SAME Public/Granted day:2020-07-02
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