Invention Grant
- Patent Title: Curable composition for nano-fabrication
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Application No.: US16579452Application Date: 2019-09-23
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Publication No.: US11549020B2Publication Date: 2023-01-10
- Inventor: Fen Wan , Weijun Liu
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Main IPC: C08F2/46
- IPC: C08F2/46 ; C08F2/50 ; C08G61/04 ; C09D4/00 ; C08F220/18 ; G03F7/00

Abstract:
A curable composition comprises at least 10 wt % expanding monomers based on a total weight of the curable composition, at least 25 wt % acrylate monomers based on the total weight of the curable composition, a photoinitiator, and a photosensitizer. The acrylate monomers have a molecular weight of 500 or less. The curable composition has a viscosity of 10 cP or less. A total amount of the expanding monomers and the acrylate monomers are at least 90 wt % based on the total weight of the curable composition.
Public/Granted literature
- US20210087407A1 Curable Composition for Nano-Fabrication Public/Granted day:2021-03-25
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