Invention Grant
- Patent Title: Sprayed lithium cobalt oxide targets
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Application No.: US16954934Application Date: 2018-12-11
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Publication No.: US11549174B2Publication Date: 2023-01-10
- Inventor: Wilmert De Bosscher , Jörg Oberste Berghaus
- Applicant: SOLERAS ADVANCED COATINGS BV
- Applicant Address: BE Deinze
- Assignee: SOLERAS ADVANCED COATINGS BV
- Current Assignee: SOLERAS ADVANCED COATINGS BV
- Current Assignee Address: BE Deinze
- Agency: Workman Nydegger
- Priority: BE2017/5957 20171218
- International Application: PCT/EP2018/084379 WO 20181211
- International Announcement: WO2019/121170 WO 20190627
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C4/11 ; C01G51/00 ; C23C14/08 ; H01J37/34 ; H01M4/04 ; H01M4/525 ; H01M10/0525 ; H01M4/02
Abstract:
A sputtering target comprising a top coat including a composition of lithium cobalt oxide LiyCozOx. x is smaller than or equal to y+z, and the lithium cobalt oxide has an X-Ray diffraction pattern with a peak P2 at 44°±0.2° 2-theta. The X-Ray diffraction pattern is measured with an X-Ray diffractometer with CuKα1 radiation.
Public/Granted literature
- US20200377994A1 SPRAYED LITHIUM COBALT OXIDE TARGETS Public/Granted day:2020-12-03
Information query
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