Invention Grant
- Patent Title: Electroplating apparatus for tailored uniformity profile
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Application No.: US17247991Application Date: 2021-01-04
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Publication No.: US11549192B2Publication Date: 2023-01-10
- Inventor: Steven T. Mayer , David W. Porter , Bryan L. Buckalew , Robert Rash
- Applicant: Novellus Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D5/18 ; C25D17/12 ; C25D21/12 ; C25D17/06 ; C25D7/12 ; H01L21/288 ; C25D21/10 ; C25D5/04 ; H01L21/768

Abstract:
An electroplating apparatus for electroplating metal on a substrate includes a plating chamber configured to contain an electrolyte, a substrate holder configured to hold and rotate the substrate during electroplating, an anode, and an azimuthally asymmetric auxiliary electrode configured to be biased both anodically and cathodically during electroplating. The azimuthally asymmetric auxiliary electrode (which may be, for example, C-shaped), can be used for controlling azimuthal uniformity of metal electrodeposition by donating and diverting ionic current at a selected azimuthal position. In another aspect, an electroplating apparatus for electroplating metal includes a plating chamber configured to contain an electrolyte, a substrate holder configured to hold and rotate the substrate during electroplating, an anode, a shield configured to shield current at the periphery of the substrate; and an azimuthally asymmetric auxiliary anode configured to donate current to the shielded periphery of the substrate at a selected azimuthal position on the substrate.
Public/Granted literature
- US20210148001A1 ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE Public/Granted day:2021-05-20
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