Invention Grant
- Patent Title: Automatic optical inspection device and method
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Application No.: US16306433Application Date: 2017-07-31
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Publication No.: US11549891B2Publication Date: 2023-01-10
- Inventor: Hailiang Lu , Junwei Jia , Pengli Zhang , Hongji Zhou , Wen Xu , Fan Wang
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201610379093.2 20160531
- International Application: PCT/CN2017/095222 WO 20170731
- International Announcement: WO2017/206966 WO 20171207
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/01

Abstract:
An automatic optical inspection (AOI) device and method are disclosed. The device is adapted to inspect an object under inspection (OUI) (102) carried on a workpiece stage (101) and includes: a plurality of detectors (111, 112) for capturing images of the OUI (102); a plurality of light sources (121, 122) for illuminating the OUI (102) in different illumination modes; and a synchronization controller (140) signal-coupled to both the plurality of detectors (111, 112) and the plurality of light sources (121, 122). The synchronization controller (140) is configured to directly or indirectly control the plurality of detectors (111, 112) and the plurality of light sources (121, 122) based on the position of the OUI (102) so that each of them is individually activated and deactivated according to a timing profile, that each of the detectors (111, 112) is able to capture images of the OUI (102) in an illumination mode provided by a corresponding one of the light sources (121, 122), and that when any one of the light sources (121, 122) is illuminating the OUI (102), only the one of the detectors (111, 112) corresponding to this light source (121, 122) is activated. Through the timing control over the multiple light sources (121, 122) and detectors (111, 112) by the synchronization controller (140), inspection with multiple measurement configurations can be accomplished within a single scan, resulting in a significant improvement in inspection efficiency.
Public/Granted literature
- US20190293566A1 AUTOMATIC OPTICAL INSPECTION DEVICE AND METHOD Public/Granted day:2019-09-26
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