Invention Grant
- Patent Title: Open architecture for wafer automatic testing system
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Application No.: US17475495Application Date: 2021-09-15
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Publication No.: US11549980B2Publication Date: 2023-01-10
- Inventor: Chien Wen Chang
- Applicant: Chien Wen Chang
- Applicant Address: TW Taoyuan
- Assignee: Chien Wen Chang
- Current Assignee: Chien Wen Chang
- Current Assignee Address: TW Taoyuan
- Priority: TW109132238 20200918
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R31/28 ; G01R1/04 ; G01R1/067 ; G01R1/073

Abstract:
An open architecture for a wafer automatic testing system of one embodiment includes a wafer auto prober including a lifter and a fixture frame; a pogo-pin interface module mounted on the fixture frame; and at least one instrument chassis mounted on the fixture frame and above the pogo-pin interface module. The at least one instrument chassis is electrically connected to the pogo-pin interface module.
Public/Granted literature
- US20220091183A1 OPEN ARCHITECTURE FOR WAFER AUTOMATIC TESTING SYSTEM Public/Granted day:2022-03-24
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