Invention Grant
- Patent Title: Optical adjustable filter sub-assembly
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Application No.: US17444534Application Date: 2021-08-05
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Publication No.: US11550170B2Publication Date: 2023-01-10
- Inventor: Li Zhang , Bangjia Wu , Huiping Li
- Applicant: II-VI Delaware, Inc
- Applicant Address: US DE Wilmington
- Assignee: II-VI Delaware, Inc
- Current Assignee: II-VI Delaware, Inc
- Current Assignee Address: US DE Wilmington
- Agency: Blank Rome LLP
- Priority: CN201711160529.X 20171120
- Main IPC: G02F1/01
- IPC: G02F1/01 ; H01L23/34 ; H01L21/02 ; H01L31/0304 ; H01L29/66 ; H01L29/20 ; B32B7/023 ; B32B17/10 ; H01L21/66

Abstract:
A method may include thinning a silicon wafer to a particular thickness. The particular thickness may be based on a passband frequency spectrum of an adjustable optical filter. The method may also include covering a surface of the silicon wafer with an optical coating. The optical coating may filter an optical signal and may be based on the passband frequency spectrum. The method may additionally include depositing a plurality of thermal tuning components on the coated silicon wafer. The plurality of thermal tuning components may adjust a passband frequency range of the adjustable optical filter by adjusting a temperature of the coated silicon wafer. The passband frequency range may be within the passband frequency spectrum. The method may include dividing the coated silicon wafer into a plurality of silicon wafer dies. Each silicon wafer die may include multiple thermal tuning components and may be the adjustable optical filter.
Public/Granted literature
- US20210382334A1 OPTICAL ADJUSTABLE FILTER SUB-ASSEMBLY Public/Granted day:2021-12-09
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