Invention Grant
- Patent Title: EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation source
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Application No.: US17336480Application Date: 2021-06-02
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Publication No.: US11550225B2Publication Date: 2023-01-10
- Inventor: Iris Pilch , Juan Jose Hasbun Wood , Christof Metzmacher , Michael Hagg
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102020206876.3 20200603
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00
Abstract:
An inner insert for a passage opening in an outer insert for an EUV radiation source is embodied in multiple parts and/or has a plurality of sections that extend in the longitudinal direction and have different internal diameters (di, da).
Public/Granted literature
Information query
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