- Patent Title: Method of manufacturing ring-shaped member and ring-shaped member
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Application No.: US17207693Application Date: 2021-03-21
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Publication No.: US11551915B2Publication Date: 2023-01-10
- Inventor: Atsushi Ikari , Satoshi Fujii
- Applicant: THINKON NEW TECHNOLOGY JAPAN CORPORATION
- Applicant Address: JP Tokyo
- Assignee: THINKON NEW TECHNOLOGY JAPAN CORPORATION
- Current Assignee: THINKON NEW TECHNOLOGY JAPAN CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Wentsler LLC
- Priority: JPJP2017-100173 20170519
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C30B29/06 ; H01L21/67 ; H01L21/3065 ; C30B33/06 ; H01L23/00

Abstract:
Provided are a method of manufacturing a ring-shaped member and the ring-shaped member. A method of manufacturing a ring-shaped member to be placed in a process chamber of a substrate processing apparatus includes arranging one silicon member and another silicon member to cause one abutting surface of the one silicon member and another abutting surface of the other silicon member to abut on each other, heating the one abutting surface and the other abutting surface through optical heating to melt silicon on a surface of the one abutting surface and silicon on a surface of the other abutting surface such that silicon melt is caused to flow into a gap between the one abutting surface and the other abutting surface, and cooling the one abutting surface and the other abutting surface to crystallize the silicon melt forming a silicon adhesion part.
Public/Granted literature
- US20210225617A1 METHOD OF MANUFACTURING RING-SHAPED MEMBER AND RING-SHAPED MEMBER Public/Granted day:2021-07-22
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