Invention Grant
- Patent Title: Resin coating applying apparatus and method of applying resin coating
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Application No.: US17004500Application Date: 2020-08-27
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Publication No.: US11551947B2Publication Date: 2023-01-10
- Inventor: Yoshinori Kakinuma , Yoshikuni Migiyama
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Bums & Crain Ltd.
- Priority: JPJP2019-160480 20190903
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/56 ; H01L21/683 ; H01L23/31

Abstract:
A resin coating applying apparatus includes a housing, a lid, a lid actuator for actuating the lid openably and closably with respect to the housing, a resin supply for supplying a solid resin to a workpiece, a vacuum pump for evacuating a processing space hermetically sealed by the housing and the lid, and an atmospheric vent valve for introducing atmospheric air into the processing space to cool the resin applied to the workpiece. The housing includes a holding table and a holding table actuator for moving the holding table upwardly and downwardly. The lid includes an upper table disposed opposite the holding table and movable relatively closely to the holding table to spread the resin supplied to the workpiece and coat the workpiece with the resin. When the lid is closed, it covers the opening in the housing to create the hermetically sealed processing space.
Public/Granted literature
- US20210066103A1 RESIN COATING APPLYING APPARATUS AND METHOD OF APPLYING RESIN COATING Public/Granted day:2021-03-04
Information query
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