Invention Grant
- Patent Title: Via structure and methods for forming the same
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Application No.: US16877670Application Date: 2020-05-19
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Publication No.: US11551967B2Publication Date: 2023-01-10
- Inventor: Meng-Pei Lu , Ming-Han Lee , Shin-Yi Yang , Tz-Jun Kuo
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/48

Abstract:
Vias and methods of making the same. The vias including a middle portion located in a via opening in an interconnect-level dielectric layer, a top portion including a top head that extends above the via opening and extends laterally beyond upper edges of the via opening and a bottom portion including a bottom head that extends below the via opening and extends laterally beyond lower edges of the via opening. The via may be formed from a refractory material.
Public/Granted literature
- US20210366765A1 VIA STRUCTURE AND METHODS FOR FORMING THE SAME Public/Granted day:2021-11-25
Information query
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