Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17227213Application Date: 2021-04-09
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Publication No.: US11552002B2Publication Date: 2023-01-10
- Inventor: Koichi Nishi
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2020-118861 20200710
- Main IPC: H01L23/482
- IPC: H01L23/482 ; H01L29/10 ; H01L29/739 ; H01L29/417 ; H01L29/40 ; H01L29/06

Abstract:
Provided is a semiconductor device in which the reliability of the gate insulating film in a trench gate is improved. The semiconductor device includes a semiconductor substrate, a plurality of trench gates, and a gate electrode. The semiconductor substrate includes an active region and a wiring region. The trench gates extend from the first active region to the wiring region. The trench gates form parts of transistors in the active region. The gate electrode is provided in the wiring region and is electrically connected to the trench gates. The end portions of the trench gates are located in the wiring region. The gate electrode is provided so as to cover gate contact portions formed at the end portions of the trench gates. The gate electrode is electrically connected to trench gates via the gate contact portions. The plurality of trench gates extend only in one direction.
Public/Granted literature
- US20220013437A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-01-13
Information query
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