Invention Grant
- Patent Title: Package structures and methods of fabricating the same
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Application No.: US16900996Application Date: 2020-06-15
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Publication No.: US11552074B2Publication Date: 2023-01-10
- Inventor: Ming-Fa Chen , Sung-Feng Yeh , Tzuan-Horng Liu , Chao-Wen Shih
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L21/768 ; H01L21/78 ; H01L23/538

Abstract:
A package structure and a method of fabricating the same are provided. The method includes bonding a first die and a second die to a wafer in a first die region of the wafer hybrid bonding; bonding a first dummy structure to the wafer in the first die region and a first scribe line of the wafer; and singulating the wafer and the first dummy structure along the first scribe line to form a stacked integrated circuit (IC) structure.
Public/Granted literature
- US20210391322A1 PACKAGE STRUCTURES AND METHODS OF FABRICATING THE SAME Public/Granted day:2021-12-16
Information query
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