Carrier storage enhanced superjunction IGBT
Abstract:
The disclosure provides a superjunction IGBT (insulated gate bipolar transistor) device, wherein a carrier storage layer of a first conductivity type is provided between a voltage sustaining layer and a base region, and a MISFET (metal-insulator-semiconductor field effect transistor) of a second conductivity type is also integrated in a cell, with at least one gate of the MISFET is connected to the emitter contact thereof. The MISFET is turned off at a low forward conduction voltage, helping to reduce the conduction voltage drop. The MISFET can provide a path for carriers of a second conductivity type and prevent the carrier storage layer from suffering a high electric field when the forward conduction voltage is slightly higher or it is at the forward blocking state, helping to improve the reliability.
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