Invention Grant
- Patent Title: Acoustic wave device, multiplexer, radio-frequency front end circuit, and communication device
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Application No.: US16783203Application Date: 2020-02-06
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Publication No.: US11552616B2Publication Date: 2023-01-10
- Inventor: Ryo Nakagawa , Shou Nagatomo , Hideki Iwamoto , Tsutomu Takai
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2017-154240 20170809
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/05 ; H03H9/145 ; H03H9/25 ; H03H9/64 ; H03H9/72

Abstract:
An acoustic wave device includes a support substrate, a silicon nitride film stacked on the support substrate, a silicon oxide film stacked on the silicon nitride film, a piezoelectric body stacked on the silicon oxide film and made of lithium tantalite, and an IDT electrode provided on one main surface of the piezoelectric body. For a wavelength normalized film thickness of the piezoelectric body, an Euler angle of the piezoelectric body, a wavelength normalized film thickness of the silicon nitride film, a wavelength normalized film thickness of the silicon oxide film, and a wavelength normalized film thickness of the IDT electrode, values are set so that at least one of a response intensity of a first higher order mode, corresponding to the response intensity of a second higher order mode, and of a response intensity of a third higher mode is greater than about −2.4.
Public/Granted literature
- US20200177153A1 ACOUSTIC WAVE DEVICE, MULTIPLEXER, RADIO-FREQUENCY FRONT END CIRCUIT, AND COMMUNICATION DEVICE Public/Granted day:2020-06-04
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