Invention Grant
- Patent Title: Transportation method
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Application No.: US16765765Application Date: 2018-11-09
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Publication No.: US11555740B2Publication Date: 2023-01-17
- Inventor: Hiroki Oyama , Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai , Yumi Kuramoto
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2017-225973 20171124
- International Application: PCT/JP2018/041729 WO 20181109
- International Announcement: WO2019/102877 WO 20190531
- Main IPC: G01J3/26
- IPC: G01J3/26 ; H01L21/673 ; B65D85/48 ; H01L21/677 ; G02B26/00 ; G02B26/02 ; H01L21/67

Abstract:
A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
Public/Granted literature
- US11592332B2 Transportation method Public/Granted day:2023-02-28
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