Invention Grant
- Patent Title: High temperature heated support pedestal in a dual load lock configuration
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Application No.: US16642199Application Date: 2018-09-19
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Publication No.: US11557500B2Publication Date: 2023-01-17
- Inventor: Vijay D. Parkhe
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/US2018/051751 WO 20180919
- International Announcement: WO2019/078989 WO 20190425
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H05H1/46
Abstract:
Embodiments of the present disclosure provide a heated support pedestal including a body comprising a ceramic material, a support arm extending radially outward from a periphery of the body that is coupled to a shaft, and a vacuum conduit disposed within the shaft and through the body to connect with a surface of the body.
Information query
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