Invention Grant
- Patent Title: Methods for forming three-dimensional memory devices
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Application No.: US16913649Application Date: 2020-06-26
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Publication No.: US11557570B2Publication Date: 2023-01-17
- Inventor: Kun Zhang , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L25/065 ; H01L23/00 ; H01L25/18 ; H01L25/00 ; H01L27/1157 ; H01L27/11573

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A sacrificial layer on a substrate, an N-type doped semiconductor layer on the sacrificial layer, and a dielectric stack on the N-type doped semiconductor layer are subsequently formed. A channel structure extending vertically through the dielectric stack and the N-type doped semiconductor layer is formed. The dielectric stack is replaced with a memory stack, such that the channel structure extends vertically through the memory stack and the N-type doped semiconductor layer. The substrate and the sacrificial layer are removed to expose an end of the channel structure. Part of the channel structure abutting the N-type doped semiconductor layer is replaced with a semiconductor plug.
Public/Granted literature
- US20210375828A1 METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES Public/Granted day:2021-12-02
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