Invention Grant
- Patent Title: Semiconductor memory device and method of forming the same
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Application No.: US17232160Application Date: 2021-04-16
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Publication No.: US11557645B2Publication Date: 2023-01-17
- Inventor: Pei-Ting Tsai , Yu-Cheng Tung , Tsuo-Wen Lu , Min-Teng Chen , Tsung-Wen Chen
- Applicant: Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: CN Quanzhou
- Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: CN Quanzhou
- Agent Winston Hsu
- Priority: CN202011567541.4 20201225
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L27/112 ; H01L27/11578 ; H01L27/11551 ; H01L27/11521 ; H01L27/11597 ; H01L27/11568

Abstract:
The present invention provides a semiconductor memory device and a fabricating method thereof. The semiconductor memory device includes a substrate, a plurality of capacitors and a supporting layer disposed on the substrate, wherein each of the capacitors is connected with at least one of the adjacent capacitors through the supporting layer. Each of the capacitors includes first electrodes, a high-k dielectric layer and a second electrode, and the high-k dielectric layer is disposed between the first electrodes and the second electrode. Due to the supporting layer directly contacts the high-k dielectric layer through a surface thereof, and the high-k dielectric layer completely covers the surface, the second electrode may be formed directly within openings with an enlarged dimension. Accordingly, the process difficulty of performing the deposition and etching processes within the openings may be reduced, and the capacitance of the capacitors is further increased.
Public/Granted literature
- US20220208959A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2022-06-30
Information query
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