Invention Grant
- Patent Title: Laminated substrate having piezoelectric film, element having piezoelectric film and method for manufacturing this laminated substrate
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Application No.: US16628524Application Date: 2018-06-22
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Publication No.: US11557713B2Publication Date: 2023-01-17
- Inventor: Kenji Shibata , Kazutoshi Watanabe , Fumimasa Horikiri
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-136447 20170712
- International Application: PCT/JP2018/023864 WO 20180622
- International Announcement: WO2019/012960 WO 20190117
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/08 ; H01L41/27
Abstract:
There is provided a laminated substrate having a piezoelectric film, including: a substrate; and a piezoelectric film provided on the substrate interposing a base film, wherein the piezoelectric film has an alkali niobium oxide based perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0
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Information query
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