Invention Grant
- Patent Title: Transport system, processing system, and article manufacturing method
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Application No.: US16169457Application Date: 2018-10-24
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Publication No.: US11557954B2Publication Date: 2023-01-17
- Inventor: Hitoshi Suzuki , Takeshi Yamamoto , Yuuya Toe , Ryota Okazaki , Kichinosuke Hirokawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JPJP2017-208421 20171027,JPJP2017-208422 20171027,JPJP2017-230989 20171130
- Main IPC: H02K41/02
- IPC: H02K41/02 ; B23Q5/22 ; B65G54/02 ; H02K41/03 ; B23Q7/14 ; B65G47/74 ; B65G37/02

Abstract:
In a transport system that moves a moving portion, which moves in a transport direction along a fixed portion, while detecting a position of the moving portion by a scale and a sensor, a guide block is installed on a second surface of a first part of the moving portion, a guide rail is installed on a first surface of the fixed portion, the scale is installed at an end of the first part of the moving portion on an opposite side across the guide block, and a sensor that has a detecting unit at a position facing the scale is installed in the fixed portion.
Public/Granted literature
- US20190131860A1 TRANSPORT SYSTEM, PROCESSING SYSTEM, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2019-05-02
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