Invention Grant
- Patent Title: Integrated circuits containing vertically-integrated capacitor-avalanche diode structures
-
Application No.: US16775573Application Date: 2020-01-29
-
Publication No.: US11558018B2Publication Date: 2023-01-17
- Inventor: Joseph Gerard Schultz , Kevin Kim
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H03F1/52
- IPC: H03F1/52 ; H01L23/522 ; H01L23/528 ; H01L27/02 ; H01L49/02 ; H01L29/78 ; H03F1/02 ; H03F3/213

Abstract:
Integrated circuits, such as power amplifier integrated circuits, are disclosed containing compact-footprint, vertically-integrated capacitor-avalanche diode (AD) structures. In embodiments, the integrated circuit includes a semiconductor substrate, a metal layer system, and a vertically-integrated capacitor-AD structure. The metal layer system includes, in turn, a body of dielectric material in which a plurality of patterned metal layers are located. The vertically-integrated capacitor-AD structure includes a first AD formed, at least in part, by patterned portions of the first patterned metal layer. A first metal-insulator-metal (MIM) capacitor is also formed in the metal layer system and at least partially overlaps with the first AD, as taken along a vertical axis orthogonal to the principal surface of the semiconductor substrate. In certain instances, at least a majority, if not the entirety of the first AD vertically overlaps with the first MIM capacitor, by surface area, as taken along the vertical axis.
Public/Granted literature
- US20210234516A1 INTEGRATED CIRCUITS CONTAINING VERTICALLY-INTEGRATED CAPACITOR-AVALANCHE DIODE STRUCTURES Public/Granted day:2021-07-29
Information query