Invention Grant
- Patent Title: Micromechanical pressure sensor with two cavities and diaphragms and corresponding production method
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Application No.: US16635644Application Date: 2018-07-20
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Publication No.: US11560302B2Publication Date: 2023-01-24
- Inventor: Friedjof Heuck , Robert Maul
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017213354.6 20170802
- International Application: PCT/EP2018/069804 WO 20180720
- International Announcement: WO2019/025211 WO 20190207
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01L9/00 ; G01L9/06 ; G01L13/02

Abstract:
In micromechanical pressure sensor device and a corresponding production method, the micromechanical pressure sensor device is provided with a first diaphragm; an adjacent first cavity; a first deformation detection device situated in and/or on the first diaphragm for detecting a deformation of the first diaphragm as a consequence of an applied external pressure change and as a consequence of an internal mechanical deformation of the pressure sensor device; a second diaphragm; an adjacent second cavity; and a second deformation detection device situated in and/or on the second diaphragm for detecting a deformation of the second diaphragm as a consequence of the internal mechanical deformation of the pressure sensor device, where the second diaphragm is developed in such a way that it is not deformable as a consequence of the external pressure change.
Public/Granted literature
- US20210130161A1 MICROMECHANICAL PRESSURE SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD Public/Granted day:2021-05-06
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