Invention Grant
- Patent Title: System for efficient manufacturing of a plurality of high-quality semiconductor single crystals by physical vapor transport
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Application No.: US16894428Application Date: 2020-06-05
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Publication No.: US11560643B2Publication Date: 2023-01-24
- Inventor: Erwin Schmitt , Michael Vogel
- Applicant: SiCrystal GmbH
- Applicant Address: DE Nuremberg
- Assignee: SiCrystal GmbH
- Current Assignee: SiCrystal GmbH
- Current Assignee Address: DE Nuremberg
- Agency: Barley Snyder
- Priority: EP19184262 20190703
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B23/00 ; C30B23/06 ; C30B29/36

Abstract:
A system for simultaneously manufacturing more than one single crystal of a semiconductor material by physical vapor transport (PVT) includes a plurality of reactors and a common vacuum channel connecting at least a pair of reactors of the plurality of reactors. Each reactor has an inner chamber adapted to accommodate a PVT growth structure for growth of a single semiconductor crystal. The common vacuum channel is connectable to a vacuum pump system for creating and/or controlling a common gas phase condition in the inner chambers of the pair of reactors.
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