Invention Grant
- Patent Title: Compliant organic substrate assembly for rigid probes
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Application No.: US16568596Application Date: 2019-09-12
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Publication No.: US11561243B2Publication Date: 2023-01-24
- Inventor: David Audette , Grant Wagner , Marc Knox , Dennis Conti
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Samuel Waldbaum
- Main IPC: G01R1/073
- IPC: G01R1/073 ; H01R13/24 ; H01R43/00 ; H01R43/20 ; H01R13/03

Abstract:
A wafer test device and methods of assembling a wafer test device involve a first laminate structure, and a second laminate structure arranged to interface with a microcircuit of the wafer. The wafer test device includes a compliant layer between the first laminate structure and the second laminate structure. The compliant layer includes an elastomer that exhibits compliance within a limited range of movement.
Public/Granted literature
- US20210080486A1 COMPLIANT ORGANIC SUBSTRATE ASSEMBLY FOR RIGID PROBES Public/Granted day:2021-03-18
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