Invention Grant
- Patent Title: Catadioptric lens and optical system comprising such a lens
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Application No.: US16544135Application Date: 2019-08-19
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Publication No.: US11561381B2Publication Date: 2023-01-24
- Inventor: Konstantin Forcht , Dirk Doering
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102017202802.5 20170221
- Main IPC: G02B17/08
- IPC: G02B17/08 ; G02B5/08 ; G02B27/28 ; G02B5/30

Abstract:
A catadioptric lens includes at least two optical elements arranged along an optical axis. Both optical elements are configured as a mirror having a substrate and a highly reflective coating applied to an interface of the substrate. The highly reflective coating extends from the interface of the substrate along a surface normal. At least one of the highly reflective coatings has one or a plurality of layers. The optical total layer thickness of the one layer of the plurality of layers increases radially from the inner area outward.
Public/Granted literature
- US11520130B2 Catadioptric lens and optical system comprising such a lens Public/Granted day:2022-12-06
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |