Invention Grant
- Patent Title: High spatial and temporal resolution synthetic aperture phase microscopy (HISTR-SAPM)
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Application No.: US17133123Application Date: 2020-12-23
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Publication No.: US11561389B2Publication Date: 2023-01-24
- Inventor: Renjie Zhou , Cheng Zheng
- Applicant: The Chinese University of Hong Kong
- Applicant Address: CN Hong Kong
- Assignee: The Chinese University of Hong Kong
- Current Assignee: The Chinese University of Hong Kong
- Current Assignee Address: CN Hong Kong
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B27/10 ; G01N21/45

Abstract:
A high spatial and temporal resolution synthetic aperture phase microscopy (HISTR-SAPM) system and methods are provided for sample imaging and metrology. The HISTR-SAPM system includes a sample-illumination path along which a first illumination beam propagates and a reference-beam path along which a second illumination beam propagates. A first digital micromirror device (DMD), a second DMD, and a first scanning objective lens are disposed in the sample-illumination path and at a first side adjacent to the sample. A second scanning objective lens passes the sample information to a beam splitter (BS), where the sample illumination beam and the reference-beam are combined to form an interferogram at a final image plane for imaging the sample. A Fourier spatial spectrum analysis and a synthetic aperture are then used to reconstruct a quantitative phase map of the sample with a high resolution and at a high-speed.
Public/Granted literature
- US20210199586A1 HIGH SPATIAL AND TEMPORAL RESOLUTION SYNTHETIC APERTURE PHASE MICROSCOPY (HISTR-SAPM) Public/Granted day:2021-07-01
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