Invention Grant
- Patent Title: Systems and methods for integrating a-axis oriented barium titanate thin films on silicon (001) via strain control
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Application No.: US16912316Application Date: 2020-06-25
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Publication No.: US11561421B2Publication Date: 2023-01-24
- Inventor: Alexander A. Demkov , Marc Reynaud , Agham Posadas
- Applicant: Board of Regents, The University of Texas System
- Applicant Address: US TX Austin
- Assignee: Board of Regents, The University of Texas System
- Current Assignee: Board of Regents, The University of Texas System
- Current Assignee Address: US TX Austin
- Main IPC: G02F1/055
- IPC: G02F1/055 ; C23C16/455 ; C30B29/32 ; C30B23/02 ; C23C16/40

Abstract:
Various embodiments of the present technology enable growth of a-axis oriented barium titanate (BTO) films by inserting a relaxed strain control layer having a larger lattice constant than the c-axis of BTO and a similar thermal expansion mismatch. As a result, in-plane tensile stress causes BTO to grow with its ferroelectric polarization in-plane. Some embodiments allow for BTO films to immediately be grown on silicon with a-axis orientation, and without the need to create thick layers for relaxation. Using various embodiments of the present technology, the BTO can be grown in-plane with minimal dislocation density that is confined to the interface region.
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