Invention Grant
- Patent Title: Prebaking device and prebaking system for display substrate
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Application No.: US16347937Application Date: 2017-12-20
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Publication No.: US11561474B2Publication Date: 2023-01-24
- Inventor: Jianfeng Shan
- Applicant: HKC Corporation Limited
- Applicant Address: CN Guangdong
- Assignee: HKC Corporation Limited
- Current Assignee: HKC Corporation Limited
- Current Assignee Address: CN Guangdong
- Priority: CN201710947510.3 20171012
- International Application: PCT/CN2017/117317 WO 20171220
- International Announcement: WO2019/071820 WO 20190418
- Main IPC: G03F7/38
- IPC: G03F7/38 ; G02F1/13 ; G03F7/40

Abstract:
The disclosure provides a prebaking device and a prebaking system for display substrate. The prebaking device includes a top plate, a bottom plate, a first side plate, a second side plate, a third side plate defined opposite to the first side plate and a fourth side plate defined opposite to the second side plate, the top plate, the bottom plate, the first side plate, the second side plate, the third side plate and the fourth side plate form a chamber cooperatively, the first side plate is defined with a window, the second side plate is defined with an air inlet hole to connect an air supply pipe of a hot air system, the fourth side plate is defined with an air exhaust hole to connect an exhaust system, the inner surface of the top plate is defined with an anti-adhere film.
Public/Granted literature
- US20190285987A1 PREBAKING DEVICE AND PREBAKING SYSTEM FOR DISPLAY SUBSTRATE Public/Granted day:2019-09-19
Information query
IPC分类: