Invention Grant
- Patent Title: Metal-containing structures, and methods of treating metal-containing material to increase grain size and/or reduce contaminant concentration
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Application No.: US16585346Application Date: 2019-09-27
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Publication No.: US11562773B2Publication Date: 2023-01-24
- Inventor: John D. Hopkins , Jordan D. Greenlee , Peng Xu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: C23C8/06
- IPC: C23C8/06 ; G11C5/06 ; H01L27/11524 ; H01L27/11556 ; H01L27/11582 ; H01L27/1157 ; H01L27/11573 ; H01L27/11529 ; C23C8/36 ; C23C28/00

Abstract:
Some embodiments include a method of forming a conductive structure. A metal-containing conductive material is formed over a supporting substrate. A surface of the metal-containing conductive material is exposed to at least one radical form of hydrogen and to at least one oxidant. The exposure alters at least a portion of the metal-containing conductive material to thereby form at least a portion of the conductive structure. Some embodiments include a conductive structure which has a metal-containing conductive material with a first region adjacent to a second region. The first region has a greater concentration of one or both of fluorine and boron relative to the second region.
Public/Granted literature
Information query
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