Invention Grant
- Patent Title: Generator with controllable source impedance
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Application No.: US17093333Application Date: 2020-11-09
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Publication No.: US11562888B2Publication Date: 2023-01-24
- Inventor: Gennady G. Gurov , Michael Mueller , Zebulun Whitman Benham
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A power supply system controls the source impedance of a generator utilizing two amplifiers having asymmetrical power profiles in reference to a nominal load impedance that are diametrically opposite in reference to the nominal load impedance. Variations in power profiles may be achieved by using different topologies for each of the amplifiers or implementing a phase delay network. The output power from the first and second amplifiers may be combined using a combiner circuit or device and the output power from the combiner is transmitted to a plasma load. The output power of each amplifier may be independently controlled to alter one or more characteristics of the output power signal provided by the individual amplifiers. By changing the ratio of the output power of the first amplifier to the output power of the second amplified, the source impedance of the generators may be varied.
Public/Granted literature
- US20210057189A1 GENERATOR WITH CONTROLLABLE SOURCE IMPEDANCE Public/Granted day:2021-02-25
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