Invention Grant
- Patent Title: Plasma processing apparatus and gas introducing method
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Application No.: US17105938Application Date: 2020-11-27
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Publication No.: US11562889B2Publication Date: 2023-01-24
- Inventor: Mayo Uda , Manabu Tsuruta , Keigo Toyoda
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2019-215263 20191128
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/20

Abstract:
A plasma processing apparatus includes a chamber having a sidewall and a plasma processing space surrounded by the sidewall, and a first side gas inlet line and a second side gas inlet line configured to introduce at least one gas from the sidewall into the plasma processing space. The first side gas inlet line includes a plurality of first side gas injectors symmetrically arranged along a circumferential direction on the sidewall and configured to introduce the gas in a first direction into the plasma processing space. Further, the second side gas inlet line includes a plurality of second side gas injectors symmetrically arranged along the circumferential direction on the sidewall and configured to introduce the gas in a second direction different from the first direction into the plasma processing space.
Public/Granted literature
- US20210166918A1 PLASMA PROCESSING APPARATUS AND GAS INTRODUCING METHOD Public/Granted day:2021-06-03
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