Invention Grant
- Patent Title: Multi-zone azimuthal heater
-
Application No.: US16856634Application Date: 2020-04-23
-
Publication No.: US11562913B2Publication Date: 2023-01-24
- Inventor: Kevin Smith , Paul Valachovic
- Applicant: Watlow Electric Manufacturing Company
- Applicant Address: US MO St. Louis
- Assignee: Watlow Electric Manufacturing Company
- Current Assignee: Watlow Electric Manufacturing Company
- Current Assignee Address: US MO St. Louis
- Agency: Burris Law, LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687

Abstract:
A heater assembly and method of controlling the heater assembly is provided. The heater assembly includes a resistive heater and a substrate, and the resistive heater comprises a plurality of heating zones disposed along a perimeter of the substrate. Each of the plurality of heating zones are independently controllable such that azimuthal temperature control of the heater assembly is provided. The plurality of resistive heating elements may be connected in series and have a common ground electrical lead. In the alternative, the plurality of resistive heating elements may each have a ground electrical lead and be isolated from each other.
Public/Granted literature
- US20200343112A1 MULTI-ZONE AZIMUTHAL HEATER Public/Granted day:2020-10-29
Information query
IPC分类: