Invention Grant
- Patent Title: Three-dimensional semiconductor device with a bit line perpendicular to a substrate
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Application No.: US16930398Application Date: 2020-07-16
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Publication No.: US11563005B2Publication Date: 2023-01-24
- Inventor: Minsu Lee , Kiseok Lee , Minwoo Song , Hyun-Sil Oh , Min Hee Cho
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2019-0165786 20191212
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C8/14 ; G11C7/18

Abstract:
A three-dimensional semiconductor device includes a first channel pattern on and spaced apart from a substrate, the first channel pattern having a first end and a second end that are spaced apart from each other in a first direction parallel to a top surface of the substrate, and a first sidewall and a second sidewall connecting between the first end and the second end, the first and second sidewalls being spaced apart from each other in a second direction parallel to the top surface of the substrate, the second direction intersecting the first direction, a bit line in contact with the first end of the first channel pattern, the bit line extending in a third direction perpendicular to the top surface of the substrate, and a first gate electrode adjacent to the first sidewall of the first channel pattern.
Public/Granted literature
- US20210183861A1 THREE-DIMENSIONAL SEMICONDUCTOR DEVICE Public/Granted day:2021-06-17
Information query
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