Invention Grant
- Patent Title: Reduction of drain leakage in nanosheet device
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Application No.: US16743256Application Date: 2020-01-15
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Publication No.: US11563082B2Publication Date: 2023-01-24
- Inventor: Pouya Hashemi , Takashi Ando , Alexander Reznicek , Ruilong Xie
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Jeffrey S. LaBaw
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/311 ; H01L21/02 ; H01L29/49 ; H01L29/08 ; H01L29/10 ; H01L29/66 ; H01L29/786 ; B82Y10/00

Abstract:
A semiconductor device including at least one nanosheet and epitaxial source and drain regions are present on opposing ends of the at least one nanosheet. A gate structure is present on a channel of the at least one nanosheet. The gate structure includes a first work function metal gate portion present at a junction portion of the source and drain regions that interfaces with the channel portion of the at least one nanosheet, and a second work function metal gate portion present on a central portion of the channel of the at least one nanosheet. The amount of metal containing nitride in the second work function metal gate portion is greater than an amount of metal containing nitride in the first work function metal gate portion. The device further includes a rotated T-shaped dielectric spacer present between the gate structure and the epitaxial source and drain regions.
Public/Granted literature
- US20210217846A1 REDUCTION OF DRAIN LEAKAGE IN NANOSHEET DEVICE Public/Granted day:2021-07-15
Information query
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