Invention Grant
- Patent Title: Method to deposit thin film high quality absorber layer
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Application No.: US17631877Application Date: 2019-08-08
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Publication No.: US11563138B2Publication Date: 2023-01-24
- Inventor: Shou Peng , Xinjian Yin , Ganhua Fu , Krishnakumar Velappan , Michael Harr , Bastian Siepchen
- Applicant: CHINA TRIUMPH INTERNATIONAL ENGINEERING CO., LTD. , CTF SOLAR GMBH
- Applicant Address: CN Shanghai; DE Dresden
- Assignee: CHINA TRIUMPH INTERNATIONAL ENGINEERING CO., LTD.,CTF SOLAR GMBH
- Current Assignee: CHINA TRIUMPH INTERNATIONAL ENGINEERING CO., LTD.,CTF SOLAR GMBH
- Current Assignee Address: CN Shanghai; DE Dresden
- Agency: Global IP Services
- Agent Tianhua Gu
- International Application: PCT/CN2019/099810 WO 20190808
- International Announcement: WO2021/022558 WO 20210211
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0296 ; C23C14/54 ; C23C14/06

Abstract:
The present invention proposes a method to form a CdSeTe thin film with a defined amount of selenium and with a high quality. The method comprises the steps of providing a base substrate and of depositing a partial CdSeTe layer on a first portion of the base substrate. The step of depositing a partial CdSeTe layer is performed at least twice, wherein a predetermined time period without deposition of a partial CdSeTe layer on the first portion of the base substrate is provided between two subsequent steps of depositing a partial CdSeTe layer. The temperature of the base substrate and the CdSeTe layer already deposited on the first portion of the base substrate is controlled during the predetermined time period such that re-evaporation of Cd and/or Te from the CdSeTe layer already deposited takes place.
Public/Granted literature
- US20220352408A1 METHOD TO DEPOSIT THIN FILM HIGH QUALITY ABSORBER LAYER Public/Granted day:2022-11-03
Information query
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